Sub 50 - nm FinFET : PMOS ( revised 12 / 9 / 1999 )

نویسندگان

  • Xuejue Huang
  • Wen-Chin Lee
  • Charles Kuo
  • Digh Hisamoto
  • Leland Chang
  • Jakub Kedzierski
  • Erik Anderson
  • Hideki Takeuchi
  • Yang-Kyu Choi
  • Kazuya Asano
  • Vivek Subramanian
  • Tsu-Jae King
  • Jeffrey Bokor
  • Chenming Hu
چکیده

High performance PMOSFETs with a gate length as short as 18-nm are reported. A self-aligned double-gate MOSFET structure (FinFET) is used to suppress the short channel effect. The 45 nm gate-length PMOS FinFET has an Idsat of 410 PA/Pm (or 820 PA/Pm depending on the definition of the width of a double-gate device) at Vd = Vg = 1.2 V and Tox = 2.5 nm. The quasi-planar nature of this variant of the double-gate MOSFETs makes device fabrication relatively easy using the conventional planar MOSFET process technologies. Simulation shows possible scaling to a 10–nm gate length.

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تاریخ انتشار 1999